Phosphorus precursor reactivity versus hydrogenated Ge surface: towards a reliable self-limited monolayer doping

Phosphorus precursor reactivity versus hydrogenated Ge surface: towards a reliable self-limited monolayer doping

Phosphorus precursor reactivity versus hydrogenated Ge surface: towards a reliable self-limited monolayer doping

F. Sgarbossa, A. Levarato, S. Carturan, G. Rizzi, G. Ciatto, C. Tubaro, F. Bondino, I. Pis, E. Napolitani, D. De Salvador

Appl. Surf. Sci. 2021, 541, 148532.

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